A02.4 - Microscopy and Microanalysis for Real World Problem Solving

Presentations:

• 1:30 PM – 2:00 PM US CST

  Review of Practical Problem Solving for Advanced Semiconductor Industry
  

  Presenting Author: Yougui Liao – Micron Technology

  Co-Author: Che-chi Lee – Micron Technology
• 2:00 PM – 2:15 PM US CST

  Artifact-free preparation of plan view TEM specimens and its application to MRAM devices
  

  Presenting Author: Cecile Bonifacio (she/her/hers) – E. A. Fischione Instruments, Inc.

  Co-Author: Richard Li (he/him/his) – E.A. Fischione Instruments Inc

  Co-Author: Pawel Nowakowski – E. A. Fischione Instruments, Inc.

  Co-Author: Mary Ray – E. A. Fischione Instruments, Inc.

  Co-Author: Paul Fischione – E. A. Fischione Instruments, Inc.
• 2:15 PM – 2:30 PM US CST

  Accurate Elemental Mapping of Semiconductor Devices Using EDS – Deconvolving Overlapping Peaks
  

  Presenting Author: Shangshang Mu, Ph.D – Gatan/EDAX

  Co-Author: David Stowe, Ph.D – Gatan/EDAX
• 2:30 PM – 2:45 PM US CST

  SEM Grain Characterization of Metals for Nanoelectronics
  

  Presenting Author: Matthew Hauwiller, PhD – Seagate Technology

  Co-Author: Charlie Mann – Seagate Technology

  Co-Author: Peter Mach, Ph.D. – Seagate Technology

  Co-Author: Karen Terry – Seagate Technology

  Co-Author: Mike Kautzky, Ph.D. – Seagate Technology
• 2:45 PM – 3:00 PM US CST

  EELS Characterization of Niobium Oxide Memristor Devices
  

  Presenting Author: Bradley T. De Gregorio (he/him/his) – U.S. Naval Research Laboratory

  Co-Author: Evgeniya Lock – U.S. Naval Research Laboratory

  Co-Author: Keith Knipling – U.S. Naval Research Laboratory

  Co-Author: Hans Cho – U.S. Naval Research Laboratory