Featured Symposium

Expanding the Role of Atom Probe Tomography in Semiconductor Manufacturing and R&D – The Initiation of a Project Between CAMECA Instruments Inc. and imec

Presenting Author(s)

• RU

  Robert Ulfig

  Sr. Product Manager
  CAMECA Instruments Inc.
  Madison, Wisconsin, United States

Co-Author(s)

• DR

  David Reinhard

  Product Manager
  CAMECA Instruments Inc.
  Madison, Wisconsin, United States
• DL

  David J. Larson

  Dir. Scientific Marketing
  CAMECA Instruments Inc.
  Madison, Wisconsin, United States
• PC

  Peter Clifton

  APT Product Sales Leader
  CAMECA Instruments Inc., Wisconsin, United States
• OD

  Olivier Dulac

  CAMECA SAS
  Gennevilliers, France
• CF

  Claudia Fleischmann

  R&D Team Leader
  Interuniversitair Microelectronica Centrum
  (1) Quantum-Solid-State Physics, Department of Physics and Astronomy, KU Leuven
  Leuven, Belgium
• Pv

  Paul van der Heide

  Department Director
  Interuniversitair Microelectronica Centrum, Belgium